Characterization of radio frequency plasma using Langmuir probe and optical emission spectroscopy
نویسندگان
چکیده
منابع مشابه
Optical emission spectroscopy and Langmuir probe diagnostics of CH3F/O2 inductively coupled plasmas
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ژورنال
عنوان ژورنال: Journal of Applied Physics
سال: 2006
ISSN: 0021-8979,1089-7550
DOI: 10.1063/1.2171777